Cleanroom Planetary Roller Screw Actuator

Estimate screw losses and prepare a qualification RFQ for cleanroom or vacuum service.

Request cleanroom sizing review

Heat estimate & RFQ

Illustrative inputs; qualification needs testing.

Motion and environment requirements

0–300 kN

0–500 kN

0–2000 mm/s

1–3000 mm

0–100 %

50–99 %

Illustrative input presets

All fields required. Ranges are tool limits, not actuator ratings. Efficiency is an editable assumption.

Illustrative mechanical loss

Average screw loss

56 W

Mechanical output in motion

1,440 W

During loaded motion, estimated screw loss is 160 W at 90% assumed efficiency; averaging uses 35% time moving under load.

Average loss = F [kN] × v [mm/s] × (1 / η − 1) × duty fraction. Force and speed must describe the same loaded segment; peak thrust and stroke are captured for the RFQ only.

This is a preliminary energy balance, not a temperature, motor sizing, fatigue life or cleanroom certification calculation. It excludes motor/drive, seals, preload, lubricant churning and idle losses. Cooling requires a measured thermal model.

Next: validate the environment

Airborne-particle review: compare sealed housings, bellows and local extraction. Specify airflow, particle sizes and operating state before testing; no ISO class alone fixes a suction pressure or flow.

Check evidence and qualification scope

Four decisions before you specify an actuator

Specify the clean zone and test conditions

Air classification describes the surrounding environment. Equipment suitability needs its own evidence for the configuration and duty being purchased.

ISO 14644-14:2026 — equipment suitability

Separate particle and molecular contamination

A particle count does not establish acceptable gas load or condensable deposits. Request material records and a chamber validation plan where vacuum is involved.

NASA Goddard — vacuum outgassing database

What the estimate calculates — and what it leaves open

Use the tool to estimate one part of the thermal budget before requesting detailed sizing. It assumes a constant force and speed during the entered loaded-motion fraction. Efficiency is the ratio of screw mechanical output to mechanical input. The 90% default is an illustrative assumption, with no product measurement attached.

  1. 1. Mechanical input
  2. 2. Screw loss + output
  3. 3. Average by duty
Energy balance — conceptual sequence, not test data.
Worked example — 15 kN, 150 mm/s, 90% efficiency, 40% loaded motion. Derived values, not measurements.
QuantityCalculationResult / meaning
Mechanical output15 × 1502,250 W during motion
Mechanical input2,250 / 0.902,500 W; motor electrical input is outside this model
Screw loss during motion2,500 − 2,250250 W
Average screw loss250 × 0.40100 W; excludes idle and other losses
Temperature rise / cooling capacityNeeds thermal resistance, ambient and all heat sourcesUnknown; cannot be selected from this result alone

For varying cycles, calculate each segment separately and average over the complete cycle. Peak thrust and stroke do not enter this simple equation: they remain in the exported RFQ for load, buckling, speed, life and packaging checks. A zero result at standstill does not mean zero holding heat.

Containment starts at the moving interface

A planetary roller screw transfers axial load through threaded rollers between the screw and nut. Its load density can make it a candidate for demanding axes, but the load rating and emission behavior belong to a specific design. Isolate the lubricated mechanism from the process and assess the rod exit, motor interface, cables, bellows and maintenance openings together.

Conceptual actuator: motor, roller screw and output rod inside an enclosure; candidate extraction interface and process boundary need validation.MotorRoller screw+ lubricantOutput rodSeal / bellows interfaceExtraction option: test firstClean process boundary →
Illustrative architecture. Housing, lubricant, seals and extraction are candidates for qualification, with no certified material or suction setting implied.

Candidate controls include an enclosed mechanism, a qualified bellows interface, or local extraction routed away from the process. Extraction may alter friction, airflow and gas load; approve the complete layout before testing. Material family names and surface finish alone do not establish suitability. Fraunhofer IPA — cleanliness-suitable equipment and components

Turn an ISO target into a test specification

Requirement planning, not a class-to-hardware certification matrix. Check the cited standard editions against the purchase specification.
RequirementWhat to defineEvidence to request
ISO Class 1–4 clean zoneParticle sizes, limits, occupancy state, sample locations and operating cycleEquipment emission report at the required sensitivity; no fixed suction value inferred
ISO Class 5–7 clean zoneThe same test dimensions, matched to the actual process riskReport for the supplied assembly, including seals, grease and accessories
Grade A / aseptic serviceSite contamination strategy, microbial control and decontamination conditionsQualified integration and cleaning/decontamination evidence; particle class alone is insufficient
High-vacuum serviceBase/operating pressure, gas species, leak rate and bakeout conditionsMaterial records plus leak, residual-gas and thermal testing of the assembly
Any change after qualificationSeal, lubricant, speed, cable or containment changesImpact assessment and agreed retest scope

ISO 14644-1:2015 — air cleanliness classification · ISO 14644-14:2026 — equipment suitability · European Commission — EU GMP Annex 1 (2022), §§2, 4–6

ISO 14644-14:2026 is the current equipment reference checked for this guide. A supplier report citing an older edition is not automatically invalid; compare its method, configuration and acceptance conditions with the new purchase specification. This guide does not prescribe a universal sampling distance, flow rate or test-cycle count.

Lubricants, seals and coatings: known versus unverified

No product-specific outgassing, particle reduction, coating life or chemical-aging results are supplied by this guide.
Candidate / evidenceKnown basisStill required before approval
PFPE / PTFE lubricantChemours discourages mixing PFPE with non-PFPE greaseExact grade, viscosity, supplier approval, cleaning procedure and service conditions
ASTM E595 material recordNASA reports total mass loss (TML) and collected volatile condensable material (CVCM)Match identity and conditioning; agree process-specific acceptance limits
PTFE / FFKM sealMaterial family is a starting point for compatibility reviewCompound, fillers, sliding wear and actual VHP/solvent aging evidence: unknown here
Stainless rod / DLC coatingPossible surface candidates for an engineered interfaceFinish, adhesion, wear debris and lubrication validation: unknown here
Complete actuator in vacuumIndividual material records can support screeningGas load, leak rate, deposits and life under the actual cycle: unknown here

Outgassing is not zero simply because a lubricant is fluorinated. ASTM E595 data support material screening; they do not establish acceptable deposits on your optics or long-term actuator behavior. Request the relevant record, preparation history and test conditions. NASA Goddard — vacuum outgassing database

A lubricant change needs controlled cleaning and supplier approval. Mixing is discouraged without implying a hazardous reaction. Chemours Krytox — lubricant compatibility FAQ

Compare architectures against your limiting requirement

Qualitative engineering tradeoffs. No price, lifetime multiplier or universal particle ranking is inferred.
ArchitectureReason to evaluateTradeoff / verification
Enclosed planetary roller screwCompact thrust transmission and controllable motionLubrication, seals and heat; confirm ratings and complete-assembly emissions
Enclosed ball screwCandidate where required thrust and stiffness are metCompare rated capacity, recirculation design and particle test evidence on equal terms
Linear motorDirect drive without a screw transmissionEvaluate holding-current heat, cables and a qualified brake for vertical loads
Mechanism outside the critical zoneReduce exposed internal contamination sourcesMotion feedthrough or bellows adds stroke, stiffness and integration constraints
Pneumatic actuationCandidate for simpler motion with suitable air supplyEvaluate exhaust routing, force regulation, air quality and process exposure

Compare delivered cost over the same service period: hardware, containment, vacuum utilities, cooling, cleaning, qualification and downtime. This guide has no comparable supplier quotes or measured life dataset; request them before calculating a payback.

Close the thermal budget before selecting cooling

  1. 1. All loss sources
  2. 2. Mount / cooling path
  3. 3. Measure full cycle
Thermal qualification — conceptual sequence, not test data.

Add motor, drive, preload, seal and lubricant losses to the modeled screw loss. Define allowable case and process temperatures, ambient conditions and mounting thermal resistance. Compare conduction into the machine with a controlled liquid circuit; validate leaks, condensation and service procedures. Any forced-air arrangement needs approval for the local process airflow. No universal 100 W threshold selects a cold plate.

Vacuum removes the atmospheric convection path. Separate the chamber thermal model from atmospheric extraction design. Ask for temperatures at the nut, bearings and mounting interface under the actual load spectrum, including idle and holding periods.

Missing particle or thermal evidence? Request a qualification-plan review before choosing a configuration.

Risks, costs and a practical fallback

Qualitative review priorities; no measured probability or numerical FMEA score is implied.
RiskConsequenceControl / alternative
Using a room class as a product certificateUnverified emissions at the process boundaryRequest the exact equipment report; test a sample before production release
Applying atmospheric suction to chamber vacuumUncontrolled gas path or pressure mismatchHave the vacuum engineer approve interfaces; consider external actuation
Seal wear or purge toward exposed productParticle or molecular contaminationTest aged seals and exhaust routing; consider a qualified bellows
Ignoring idle, holding or seal heatThermal drift or overheatingMeasure the full cycle; revise mounting/cooling and motion profile
Changing lubricant or decontamination exposureWear, residue or chemical damageApprove grades and cleaning; repeat compatibility and relevant performance checks
Underbudgeting qualification and maintenanceHigher project cost and delayed acceptanceQuote test work and replacement intervals alongside hardware

If evidence is missing, the minimum useful next step is a requirements review and an agreed feasibility test. Treat an untested assembly as unverified; evaluate locating it outside the critical zone if in-process qualification is impractical.

Three illustrative RFQ scenarios

These hypothetical scenarios use the tool presets at 90% assumed efficiency. They are calculated examples, with no customer deployment, measured particle result or regulatory approval implied.

Wafer handling

Inputs: 8 kN at 180 mm/s; 35% loaded motion; target ISO Class 3 in air.

1,440 W output → 160 W screw loss in motion → 56 W average.

Next action: Provide the process particle sizes and full cycle; compare containment candidates with equipment emission testing.

Aseptic equipment

Inputs: 25 kN at 120 mm/s; 50% loaded motion; target ISO Class 5 clean zone.

3,000 W output → 333.3 W loss in motion → 166.7 W average.

Next action: Review actual decontamination exposure and the contamination control strategy. This estimate cannot establish Grade A suitability.

Vacuum mechanism

Inputs: 12 kN at 60 mm/s; 20% loaded motion; target ISO Class 4 surrounding zone.

720 W output → 80 W loss in motion → 16 W average.

Next action: Specify chamber pressure, leak and gas-load limits separately. Validate material records, pump interfaces and conductive cooling.

Sources, dates and evidence limits

By Roller Screw Actuators (RSA) · Published · Reviewed

References checked on . Public standard summaries establish scope; the full applicable standards and project acceptance criteria are needed to commission a test. The model is an energy balance with user assumptions. No proprietary particle test, comparative fatigue dataset or customer case record is available for this page. The editorial owner will review this guide by 1 May 2027, or earlier if a cited standard or the model changes.

Cleanroom planetary roller screw actuator RFQ tool with 8 kN thrust, 180 mm/s speed and 56 W average screw loss
Original software run, 1 November 2026: 8 kN × 180 mm/s = 1,440 W output; at 90% assumed efficiency and 35% loaded motion, average screw loss is 56 W. This capture demonstrates software arithmetic, with no measured hardware performance or customer endorsement.

NASA Goddard — vacuum outgassing database

Material-specific ASTM E595 records include TML, CVCM and preparation history. Match the material and conditioning; a database entry is not an assembly vacuum qualification.

Qualification and delivery checklist

  1. 1. Agree requirements
  2. 2. Test configuration
  3. 3. Document acceptance
Release path — conceptual sequence, not test data.
  1. Define duty: loaded segments, thrust, stroke, speed, acceleration, idle periods, orientation, side loads, screw lead and holding/braking requirements.
  2. Define the process: ISO target, particle sizes, occupancy state, sample locations, local airflow, vacuum pressure or nitrogen purity, and sensitive surfaces.
  3. Approve interfaces: materials, seal grades, lubricant, extraction or purge routing, cooling, electrical bonding and motor/encoder arrangement.
  4. Request evidence: report ID, standard edition, exact assembly configuration, operating conditions, background measurements, detection limits and acceptance criteria.
  5. Plan lifecycle: approved cleaning/decontamination procedure, packaging and airlock transfer, storage, lubrication interval and replacement/retest triggers. Agree compatible bags and handling with the receiving facility; no universal bakeout temperature applies.

Use the RFQ builder to capture the motion baseline, then add these unresolved requirements before sending it.

Questions engineers and buyers ask

Selection

Does a planetary roller screw automatically produce fewer particles than a ball screw?

No general particle reduction is established here. Compare complete assemblies under the same motion, load, airflow, lubrication and sampling conditions.

When is a planetary roller screw worth evaluating?

Evaluate it where thrust density, stiffness and motion control matter. Confirm supplier load ratings, life method, maintenance and particle evidence for the actual configuration.

Is an ISO Class 5 actuator sufficient for a Grade A isolator?

A particle test alone does not demonstrate aseptic suitability. Review microbial control, cleanability, decontamination and integration under the site contamination control strategy.

Are the presets customer deployments?

No. They are hypothetical input examples to demonstrate the energy calculation and RFQ workflow, without measured contamination or service-life outcomes.

Calculation

How is average screw heat loss estimated?

Multiply mechanical output F × v by (1 / efficiency − 1), then by the loaded-motion fraction. The result excludes motor, drive, seal, preload and idle losses.

Why do peak force and stroke not change the heat result?

They are RFQ requirements. This simplified model assumes one constant loaded-motion segment. A real cycle needs segment-by-segment forces, speeds, acceleration and idle losses.

Does zero speed or zero duty mean the actuator stays cold?

No. Only modeled loaded-motion loss is zero. Holding current and other losses can still heat the assembly; thermal testing remains necessary.

Does the tool select a motor or predict screw life?

No. Lead, inertia, acceleration, load spectrum, preload, buckling, critical speed and cooling are outside this estimate. Send them to the supplier for application sizing.

Containment

Which ISO classes mandate a particular suction port?

This page establishes no class-to-port rule. Choose containment or extraction by risk assessment and validate the assembled equipment under the required operating conditions.

Can atmospheric extraction settings be used inside a high-vacuum chamber?

They are different design problems. Specify chamber pressure, gas load, leak limits and pump interfaces separately with the vacuum engineer.

Can nitrogen purge introduce contamination?

Yes. An outward purge may transport internal particles or lubricant vapour toward a sensitive process. Define gas purity and exhaust routing, then test under motion.

Materials

Does PFPE grease certify a mechanism for vacuum use?

No. Require the exact grade, preparation, relevant material test records and assembly validation. Vapour pressure and outgassing depend on conditions and formulation.

Can PFPE simply be added to existing hydrocarbon grease?

Avoid mixing. Chemours advises against mixing PFPE with other greases; use the supplier-approved cleaning and relubrication procedure before reassessment.

Are PTFE, FFKM and stainless steel universally resistant to VHP?

Do not assume that from a material family name. Obtain grade-specific compatibility and aging evidence at the actual concentration, temperature and cycle count.

Verification

Which edition of ISO 14644-14 is referenced?

The equipment-suitability reference was checked on 1 November 2026: ISO 14644-14:2026, edition 2. Specify the edition in your test request and assess older reports against it.

What if my supplier has no cleanroom test report?

Treat suitability as unverified. Request a controlled feasibility test or place the mechanism outside the critical zone with a qualified motion interface before making a production commitment.

Request a cleanroom application review

Send the RFQ brief plus your particle, vacuum or decontamination criteria. Ask for a proposed configuration and a verification plan before approval.

Inquiry Email

[email protected]

Include force, stroke, speed, duty cycle, life target, quantity, and delivery country.

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